Invention Grant
- Patent Title: Orthogonal processing of organic materials used in electronic and electrical devices
- Patent Title (中): 用于电子和电气设备的有机材料的正交处理
-
Application No.: US12994353Application Date: 2009-05-21
-
Publication No.: US08846301B2Publication Date: 2014-09-30
- Inventor: Christopher K. Ober , George Malliaras , Jin-Kyun Lee , Alexander Zakhidov , Margarita Chatzichristidi , Priscilla Taylor
- Applicant: Christopher K. Ober , George Malliaras , Jin-Kyun Lee , Alexander Zakhidov , Margarita Chatzichristidi , Priscilla Taylor
- Applicant Address: US NY Ithaca
- Assignee: Cornell University
- Current Assignee: Cornell University
- Current Assignee Address: US NY Ithaca
- Agency: Hodgson Russ LLP
- International Application: PCT/US2009/044863 WO 20090521
- International Announcement: WO2009/143357 WO 20091126
- Main IPC: G03F7/32
- IPC: G03F7/32 ; G03F7/30 ; G03F7/36 ; G03F7/42 ; G03F7/20

Abstract:
An orthogonal process for photolithographic patterning organic structures is disclosed. The disclosed process utilizes fluorinated solvents or supercritical CO2 as the solvent so that the performance of the organic conductors and semiconductors would not be adversely affected by other aggressive solvent. One disclosed method may also utilize a fluorinated photoresist together with the HFE solvent, but other fluorinated solvents can be used. In one embodiment, the fluorinated photoresist is a resorcinarene, but various fluorinated polymer photoresists and fluorinated molecular glass photoresists can be used as well. For example, a copolymer perfluorodecyl methacrylate (FDMA) and 2-nitrobenzyl methacrylate (NBMA) is a suitable orthogonal fluorinated photoresist for use with fluorinated solvents and supercritical carbon dioxide in a photolithography process. The combination of the fluorinated photoresist and the fluorinated solvent provides a robust, orthogonal process that is yet to be achieved by methods or devices known in the art.
Public/Granted literature
- US20110159252A1 Orthogonal Procesing of Organic Materials Used in Electronic and Electrical Devices Public/Granted day:2011-06-30
Information query
IPC分类: