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US08847222B2 Semiconductor device test structures and methods 有权
半导体器件测试结构和方法

Semiconductor device test structures and methods
Abstract:
Semiconductor device test structures and methods are disclosed. In a preferred embodiment, a test structure includes a feed line, a stress line disposed proximate the feed line, and a conductive feature disposed between the stress line and the feed line. The test structure includes a temperature adjuster proximate at least the conductive feature, and at least one feedback device coupled to the temperature adjuster and at least the conductive feature.
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