Invention Grant
US08847322B2 Dual polysilicon gate of a semiconductor device with a multi-plane channel
有权
具有多平面通道的半导体器件的双多晶硅栅极
- Patent Title: Dual polysilicon gate of a semiconductor device with a multi-plane channel
- Patent Title (中): 具有多平面通道的半导体器件的双多晶硅栅极
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Application No.: US13926974Application Date: 2013-06-25
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Publication No.: US08847322B2Publication Date: 2014-09-30
- Inventor: Kwan-Yong Lim , Heung-Jae Cho , Min-Gyu Sung
- Applicant: SK hynix Inc.
- Applicant Address: KR Icheon-si
- Assignee: SK hynix Inc.
- Current Assignee: SK hynix Inc.
- Current Assignee Address: KR Icheon-si
- Agency: Kilpatrick Townsend & Stockton LLP
- Priority: KR10-2006-0097296 20061002
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L21/8238 ; H01L21/28 ; H01L27/105 ; H01L29/78 ; H01L21/225

Abstract:
A dual polysilicon gate of a semiconductor device includes a substrate having a first region, a second region, and a third region, and a channel region with a protrusion structure formed in the substrate of the first region, a gate insulating layer formed over the substrate, a first polysilicon layer filling the channel region, and formed over the gate insulating layer of the first and second regions, a second polysilicon layer formed over the gate insulating layer of the third region, and an insulating layer doped with an impurity, and disposed inside the first polysilicon layer in the channel region.
Public/Granted literature
- US20130285144A1 DUAL POLYSILICON GATE OF A SEMICONDUCTOR DEVICE WITH A MULTI-PLANE CHANNEL Public/Granted day:2013-10-31
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