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US08847322B2 Dual polysilicon gate of a semiconductor device with a multi-plane channel 有权
具有多平面通道的半导体器件的双多晶硅栅极

Dual polysilicon gate of a semiconductor device with a multi-plane channel
Abstract:
A dual polysilicon gate of a semiconductor device includes a substrate having a first region, a second region, and a third region, and a channel region with a protrusion structure formed in the substrate of the first region, a gate insulating layer formed over the substrate, a first polysilicon layer filling the channel region, and formed over the gate insulating layer of the first and second regions, a second polysilicon layer formed over the gate insulating layer of the third region, and an insulating layer doped with an impurity, and disposed inside the first polysilicon layer in the channel region.
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