Invention Grant
US08847495B2 Movable grounding arrangements in a plasma processing chamber and methods therefor 有权
等离子体处理室中的可移动接地装置及其方法

Movable grounding arrangements in a plasma processing chamber and methods therefor
Abstract:
A plasma processing systems having at least one plasma processing chamber, comprising a movable grounding component, an RF contact component configured to receive RF energy from an RF source when the RF source provides the RF energy to the RF contact component, and a ground contact component coupled to ground. The plasma processing system further includes an actuator operatively coupled to the movable grounding component for disposing the movable grounding component in a first position and a second position. The first position represents a position whereby the movable grounding component is not in contact with at least one of the RF contact component and the ground contact component. The second position represents a position whereby the movable grounding component is in contact with both the RF contact component and the ground contact component.
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