Invention Grant
US08847495B2 Movable grounding arrangements in a plasma processing chamber and methods therefor
有权
等离子体处理室中的可移动接地装置及其方法
- Patent Title: Movable grounding arrangements in a plasma processing chamber and methods therefor
- Patent Title (中): 等离子体处理室中的可移动接地装置及其方法
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Application No.: US13616641Application Date: 2012-09-14
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Publication No.: US08847495B2Publication Date: 2014-09-30
- Inventor: Anthony de la Llera , Michael C. Kellogg , Alexei Marakhtanov , Rajinder Dhindsa
- Applicant: Anthony de la Llera , Michael C. Kellogg , Alexei Marakhtanov , Rajinder Dhindsa
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Martine Penilla Group, LLP
- Main IPC: H01J7/24
- IPC: H01J7/24

Abstract:
A plasma processing systems having at least one plasma processing chamber, comprising a movable grounding component, an RF contact component configured to receive RF energy from an RF source when the RF source provides the RF energy to the RF contact component, and a ground contact component coupled to ground. The plasma processing system further includes an actuator operatively coupled to the movable grounding component for disposing the movable grounding component in a first position and a second position. The first position represents a position whereby the movable grounding component is not in contact with at least one of the RF contact component and the ground contact component. The second position represents a position whereby the movable grounding component is in contact with both the RF contact component and the ground contact component.
Public/Granted literature
- US20130134876A1 MOVABLE GROUNDING ARRANGEMENTS IN A PLASMA PROCESSING CHAMBER AND METHODS THEREFOR Public/Granted day:2013-05-30
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