Invention Grant
- Patent Title: Cavity opto-mechanical sensor array
- Patent Title (中): 腔体光电传感器阵列
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Application No.: US13945075Application Date: 2013-07-18
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Publication No.: US08848197B2Publication Date: 2014-09-30
- Inventor: Marcel W. Pruessner , Todd H. Stievater , William S. Rabinovich
- Applicant: Marcel W. Pruessner , Todd H. Stievater , William S. Rabinovich
- Applicant Address: US DC Washington
- Assignee: The United States of America, as represented by the Secretary of the Navy
- Current Assignee: The United States of America, as represented by the Secretary of the Navy
- Current Assignee Address: US DC Washington
- Agency: US Naval Research Laboratory
- Agent Kerry L. Broome
- Main IPC: G01B9/02
- IPC: G01B9/02 ; G01N21/17 ; G01G3/16 ; G01N29/036

Abstract:
A mass sensor system including multiple Fabry-Perot microcavities connected in parallel by multiple waveguides. Each of the mass sensors includes a microbridge having a fundamental resonance frequency, and a movable reflective mirror etched into the microbridge; a fixed reflective mirror etched in a substrate, the fixed reflective mirror being fixed to the substrate in a region spaced apart from the movable reflective mirror; and an optical waveguide etched in the substrate that connects the movable mirror and the fixed mirror forming the Fabry-Perot microcavity interferometer. The system includes a tunable continuous-wave laser operative to optically interrogate the Fabry-Perot microcavity of each of the plurality of mass sensors, and a receiver operative to receive sensor signals from each of the plurality of mass sensors, the sensor signals comprising reflective signals and transmitted signals. A continuous-wave laser may generate optical forces that modify the motion, dynamics, or mechanical Q-factor of the microbridge.
Public/Granted literature
- US20130330232A1 CAVITY OPTO-MECHANICAL SENSOR ARRAY Public/Granted day:2013-12-12
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