Invention Grant
- Patent Title: Micromechanical component and manufacturing method for a micromechanical component
- Patent Title (中): 微机械部件的微机械部件和制造方法
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Application No.: US13288750Application Date: 2011-11-03
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Publication No.: US08850891B2Publication Date: 2014-10-07
- Inventor: Jochen Reinmuth
- Applicant: Jochen Reinmuth
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Kenyon & Kenyon LLP
- Priority: DE102011011160 20110105
- Main IPC: G01P15/125
- IPC: G01P15/125 ; B81B3/00 ; G01P15/18 ; G01P15/08

Abstract:
A micromechanical component having a fixing point and a seismic weight, which is connected to the fixing point by at least one spring and is made at least partially out of a first material, the first material being a semiconductor material, the seismic weight being additionally made out of at least one second material, and the second material having a higher density than the first material. In addition, a manufacturing method for a micromechanical component is provided, having the steps of forming a seismic weight at least partially out of a first material, the first material being a semiconductor material, connecting the seismic weight to a fixing point of the micromechanical component, using at least one spring, and forming the seismic weight from the first material and at least one second material, which has a higher density than the first material.
Public/Granted literature
- US20120167681A1 MICROMECHANICAL COMPONENT AND MANUFACTURING METHOD FOR A MICROMECHANICAL COMPONENT Public/Granted day:2012-07-05
Information query
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