Invention Grant
- Patent Title: Microelectromechanical three-axis capacitive accelerometer
- Patent Title (中): 微机电三轴电容式加速度计
-
Application No.: US13161345Application Date: 2011-06-15
-
Publication No.: US08863575B2Publication Date: 2014-10-21
- Inventor: Attilio Frangi , Biagio De Masi , Barbara Simoni
- Applicant: Attilio Frangi , Biagio De Masi , Barbara Simoni
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroelectronics S.R.L.
- Current Assignee: STMicroelectronics S.R.L.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed IP Law Group PLLC
- Priority: ITTO2010A0511 20100615
- Main IPC: G01P15/125
- IPC: G01P15/125 ; G01P15/18

Abstract:
A micromechanical structure for a MEMS structure is provided with: a substrate; a single inertial mass having a main extension in a plane and arranged suspended above the substrate; and a frame element, elastically coupled to the inertial mass by coupling elastic elements and to anchorages, which are fixed with respect to the substrate by anchorage elastic elements. The coupling elastic elements and the anchorage elastic elements are configured so as to enable a first inertial movement of the inertial mass in response to a first external acceleration acting in a direction lying in the plane and also a second inertial movement of the inertial mass in response to a second external acceleration acting in a direction transverse to the plane.
Public/Granted literature
- US20120000287A1 MICROELECTROMECHANICAL THREE-AXIS CAPACITIVE ACCELEROMETER Public/Granted day:2012-01-05
Information query
IPC分类: