Invention Grant
- Patent Title: Optical MEMS scanning micro-mirror with speckle reduction
- Patent Title (中): 光学MEMS扫描微镜，减少斑点
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Application No.: US13638217Application Date: 2010-04-28
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Publication No.: US08864316B2Publication Date: 2014-10-21
- Inventor: Lucio Kilcher , Nicolas Abele , Faouzi Khechana
- Applicant: Lucio Kilcher , Nicolas Abele , Faouzi Khechana
- Applicant Address: CH Lausanne
- Assignee: Lemoptix SA
- Current Assignee: Lemoptix SA
- Current Assignee Address: CH Lausanne
- Agency: Tarolli, Sundheim, Covell & Tummino LLP
- International Application: PCT/EP2010/055760 WO 20100428
- International Announcement: WO2011/134513 WO 20111103
- Main IPC: G03B21/28
- IPC: G03B21/28 ; G02B5/02 ; G02B27/48 ; G02B26/08
Abstract:
Optical MEMS scanning micro-mirror comprising: —a movable scanning micro-mirror (101) pivotally connected to a MEMS body (102) substantially surrounding the lateral sides of the micro-mirror; —an transparent prism (500, 600) substantially covering the reflection side of the micro-mirror; —wherein said prism has its outer face non-parallel to the micro-mirror neutral plane N-N, thereby providing a dual anti-speckle and anti-reflection effect, namely against parasitic light. The invention also provides the corresponding micro-projection system and method for reducing speckle.
Public/Granted literature
- US20130242275A1 OPTICAL MEMS SCANNING MICRO-MIRROR WITH SPECKLE REDUCTION Public/Granted day:2013-09-19
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