Invention Grant
- Patent Title: Crucible protection sheet and crucible apparatus using the crucible protection sheet
- Patent Title (中): 使用坩埚保护板的坩埚保护板和坩埚装置
-
Application No.: US12373182Application Date: 2007-07-09
-
Publication No.: US08864908B2Publication Date: 2014-10-21
- Inventor: Yoshiaki Hirose , Tetsuya Yuki
- Applicant: Yoshiaki Hirose , Tetsuya Yuki
- Applicant Address: JP Osaka-shi
- Assignee: Toyo Tanso Co., Ltd.
- Current Assignee: Toyo Tanso Co., Ltd.
- Current Assignee Address: JP Osaka-shi
- Agency: Westerman, Hattori, Daniels & Adrian, LLP
- Priority: JP2006-193618 20060714; JP2006-193619 20060714; JP2006-193620 20060714; JP2006-235255 20060831; JP2006-309491 20061115
- International Application: PCT/JP2007/063661 WO 20070709
- International Announcement: WO2008/007637 WO 20080117
- Main IPC: C30B35/00
- IPC: C30B35/00 ; C30B13/28 ; C30B15/20 ; C30B15/26 ; C30B11/00 ; C30B15/00 ; C30B21/06 ; C30B27/02 ; C30B28/10 ; C30B30/04 ; F27B14/10 ; C30B15/10

Abstract:
A crucible protection sheet is provided that can prevent damages to an inner crucible, hinder an outer crucible from silicon-carbidization, and transmit heat from the outer crucible to the inner crucible uniformly.In a crucible having an inner crucible 2 and an outer crucible 3, the crucible protection sheet is arranged between the two crucibles and is made of expanded graphite. The planar thermal conductivity is 120 W/(m·K) or higher, the gas permeability is less than 1.0×10−4 cm2/s, and the compression ratio is 20% or higher when the sheet is compressed in a thickness direction at a pressure of 34.3 MPa. Since the compression ratio is high, the effect of preventing breakage is great when inserting the inner crucible, improving workability and preventing the inner crucible from tilting inside the outer crucible. In addition, even though the compression ratio is high, the thermal conductivity is kept to such a degree that the inner crucible can be heated uniformly, and the gas shielding capability is also ensured. As a result, the outer crucible is prevented from silicon-carbidization and thickness decrease.
Public/Granted literature
- US20090308307A1 CRUCIBLE PROTECTION SHEET AND CRUCIBLE APPARATUS USING THE CRUCIBLE PROTECTION SHEET Public/Granted day:2009-12-17
Information query
IPC分类: