Invention Grant
- Patent Title: Cleaning methods for improved photovoltaic module efficiency
- Patent Title (中): 提高光伏组件效率的清洁方法
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Application No.: US13197614Application Date: 2011-08-03
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Publication No.: US08864915B2Publication Date: 2014-10-21
- Inventor: Renhe Jia , Adam Brand , Liming Zhang , Dapeng Wang , Tzay-Fa Su , Vijay Parihar
- Applicant: Renhe Jia , Adam Brand , Liming Zhang , Dapeng Wang , Tzay-Fa Su , Vijay Parihar
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson & Sheridan, LLP
- Main IPC: B08B3/00
- IPC: B08B3/00 ; B08B3/12 ; H01L31/18 ; B23K26/16 ; H01L31/0392 ; B23K26/36 ; B08B3/08
Abstract:
A method of processing a substrate having a transparent conductive oxide disposed thereon, including: exposing the substrate to a first cleaning solution comprising hydrogen peroxide and ammonium citrate; exposing the substrate to a second cleaning solution having a pH within a range from about 6 to about 7, the second cleaning solution different than the first cleaning solution; agitating the second cleaning solution; and depositing a silicon-containing film on the transparent conductive oxide.
Public/Granted literature
- US20120037181A1 CLEANING METHODS FOR IMPROVED PHOTOVOLTAIC MODULE EFFICIENCY Public/Granted day:2012-02-16
Information query
