Invention Grant
- Patent Title: Silsequioxane-titania hybrid polymers
- Patent Title (中): 硅氧烷 - 二氧化钛杂化聚合物
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Application No.: US12091811Application Date: 2006-10-25
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Publication No.: US08865845B2Publication Date: 2014-10-21
- Inventor: Paul J. Popa , Lynne K. Mills , Kevin E. Howard
- Applicant: Paul J. Popa , Lynne K. Mills , Kevin E. Howard
- Assignee: Dow Global Technologies LLC
- Current Assignee: Dow Global Technologies LLC
- International Application: PCT/US2006/041662 WO 20061025
- International Announcement: WO2007/053396 WO 20070510
- Main IPC: C08F283/12
- IPC: C08F283/12 ; G03F7/09 ; C08G77/58 ; G03F7/075
Abstract:
The invention relates to silsesquioxane-titania hybrid polymers, wherein the titania domain size is less than about five nanometers. Such polymers are useful, for example, to form anti-reflection coatings in the fabrication of microelectronic devices.
Public/Granted literature
- US20100221666A1 SILSEQUIOXANE-TITANIA HYBRID POLYMERS Public/Granted day:2010-09-02
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