Invention Grant
- Patent Title: Electromagnetic radiation detector with micro-encapsulation, and device for detecting electromagnetic radiation using such detectors
- Patent Title (中): 具有微封装的电磁辐射检测器,以及使用这种检测器检测电磁辐射的装置
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Application No.: US13058968Application Date: 2009-10-06
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Publication No.: US08866082B2Publication Date: 2014-10-21
- Inventor: Michel Vilain
- Applicant: Michel Vilain
- Applicant Address: FR Veurey Voroize
- Assignee: ULIS
- Current Assignee: ULIS
- Current Assignee Address: FR Veurey Voroize
- Agency: Westerman, Hattori, Daniels & Adrian, LLP
- Priority: FR0856790 20081007
- International Application: PCT/FR2009/051901 WO 20091006
- International Announcement: WO2010/040945 WO 20100415
- Main IPC: G01J5/00
- IPC: G01J5/00 ; G01J5/02 ; G01J5/20 ; H01L31/09 ; G01J5/08

Abstract:
This electromagnetic radiation detector consists of a plurality of elementary detection micro-sites, each including a micro-detector provided with a membrane (2) that is sensitive to the radiation in question and each being provided in a micro-cavity or micro-capsule defined by a substrate (1), by an upper wall (5) used as a window that is transparent to said radiation and by side walls (4), said membrane (2) being suspended above substrate (1) by means of at least two support arms (6) that include an electrically conducting layer (17), with the ends of said arms (6) being anchored in side walls (4).
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