Invention Grant
- Patent Title: Thin film transistor and method for fabricating the same
- Patent Title (中): 薄膜晶体管及其制造方法
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Application No.: US13726802Application Date: 2012-12-26
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Publication No.: US08866141B2Publication Date: 2014-10-21
- Inventor: KiSul Cho , MiKyung Park , JaeYeong Choi
- Applicant: LG Display Co., Ltd.
- Applicant Address: KR Seoul
- Assignee: LG Display Co., Ltd.
- Current Assignee: LG Display Co., Ltd.
- Current Assignee Address: KR Seoul
- Agency: Morgan, Lewis & Bockius LLP
- Priority: KR10-2012-0037527 20120410
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L29/786 ; H01L29/66 ; H01L27/07 ; H01L29/417

Abstract:
A thin film transistor and a method for fabricating the same are disclosed. The thin film transistor includes: a gate electrode formed on a substrate and having a plurality of horizontal electrode parts spaced apart at regular intervals; a gate insulating film formed over the entire surface of the substrate including the gate electrode; an active pattern formed on the gate insulating film above the plurality of horizontal electrode parts; an etch stop film pattern formed above the active pattern and the gate insulating film so as to overlap top portions of the active pattern and the gate electrode and; a source electrode formed on the active pattern, the gate insulating film, and the etch stop film pattern so as to overlap top portions of adjacent horizontal electrode parts; and a drain electrode formed on the active pattern, the gate insulating film, and the etch stop film pattern so as to overlap top portions of horizontal electrode parts located on the outermost ends.
Public/Granted literature
- US20130264570A1 THIN FILM TRANSISTOR AND METHOD FOR FABRICATING THE SAME Public/Granted day:2013-10-10
Information query
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