Invention Grant
US08866212B2 Structures and methods of improving reliability of non-volatile memory devices
有权
提高非易失性存储器件可靠性的结构和方法
- Patent Title: Structures and methods of improving reliability of non-volatile memory devices
- Patent Title (中): 提高非易失性存储器件可靠性的结构和方法
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Application No.: US13107005Application Date: 2011-05-13
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Publication No.: US08866212B2Publication Date: 2014-10-21
- Inventor: Shyue Seng Tan
- Applicant: Shyue Seng Tan
- Applicant Address: SG Singapore
- Assignee: GLOBALFOUNDRIES Singapore Pte Ltd
- Current Assignee: GLOBALFOUNDRIES Singapore Pte Ltd
- Current Assignee Address: SG Singapore
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L29/92
- IPC: H01L29/92 ; H01L21/28 ; H01L29/423 ; H01L29/792 ; H01L29/78 ; H01L29/66 ; H01L29/788

Abstract:
In one example, the memory device disclosed herein includes a gate insulation layer and a charge storage layer positioned above the gate insulation layer, wherein the charge storage layer has a first width. The device further includes a blocking insulation layer positioned above the charge storage layer and a gate electrode positioned above the blocking insulation layer, wherein the gate electrode has a second width that is greater than the first width. An illustrative method disclosed herein includes forming a gate stack for a memory device, wherein the gate stack includes a gate insulation layer, an initial charge storage layer, a blocking insulation layer and a gate electrode, and wherein the initial charge storage layer has a first width. The method further includes performing an etching process to selectively remove at least a portion of the initial charge storage layer so as to produce a charge storage layer having a second width that is less than the first width of the initial charge storage layer.
Public/Granted literature
- US20120286348A1 Structures and Methods of Improving Reliability of Non-Volatile Memory Devices Public/Granted day:2012-11-15
Information query
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