Invention Grant
- Patent Title: Vertical transistor having an asymmetric gate
- Patent Title (中): 具有非对称栅极的垂直晶体管
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Application No.: US13271812Application Date: 2011-10-12
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Publication No.: US08866214B2Publication Date: 2014-10-21
- Inventor: Dechao Guo , Shu-Jen Han , Keith Kwong Hon Wong , Jun Yuan
- Applicant: Dechao Guo , Shu-Jen Han , Keith Kwong Hon Wong , Jun Yuan
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Harrington & Smith
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/66 ; H01L29/49

Abstract:
A transistor structure is formed to include a substrate and, overlying the substrate, a source; a drain; and a channel disposed vertically between the source and the drain. The channel is coupled to a gate conductor that surrounds the channel via a layer of gate dielectric material that surrounds the channel. The gate conductor is composed of a first electrically conductive material having a first work function that surrounds a first portion of a length of the channel and a second electrically conductive material having a second work function that surrounds a second portion of the length of the channel. A method to fabricate the transistor structure is also disclosed. The transistor structure can be characterized as being a vertical field effect transistor having an asymmetric gate.
Public/Granted literature
- US20130093000A1 VERTICAL TRANSISTOR HAVING AN ASYMMETRIC GATE Public/Granted day:2013-04-18
Information query
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