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US08866218B2 Wafer level MOSFET metallization 有权
晶圆级MOSFET金属化

Wafer level MOSFET metallization
Abstract:
In one general aspect, a system can include a through-silicon-via (TSV) coupling a drain region associated with a vertical transistor to a back metal disposed on a second side of the substrate opposite the first side. The system can include a first metal layer, and a second metal layer aligned orthogonal to the first metal layer. The system can define a conduction path extending substantially vertically through the TSV to the substrate and laterally through the substrate.
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