Invention Grant
- Patent Title: Wafer level MOSFET metallization
- Patent Title (中): 晶圆级MOSFET金属化
-
Application No.: US13918562Application Date: 2013-06-14
-
Publication No.: US08866218B2Publication Date: 2014-10-21
- Inventor: Daniel M. Kinzer , Steven Sapp , Chung-Lin Wu , Oseob Jeon , Bigidis Dosdos
- Applicant: Fairchild Semiconductor Corporation
- Applicant Address: US ME South Portland
- Assignee: Fairchild Semiconductor Corporation
- Current Assignee: Fairchild Semiconductor Corporation
- Current Assignee Address: US ME South Portland
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L23/62 ; H01L23/02 ; H01L29/78 ; H01L29/417 ; H01L23/00

Abstract:
In one general aspect, a system can include a through-silicon-via (TSV) coupling a drain region associated with a vertical transistor to a back metal disposed on a second side of the substrate opposite the first side. The system can include a first metal layer, and a second metal layer aligned orthogonal to the first metal layer. The system can define a conduction path extending substantially vertically through the TSV to the substrate and laterally through the substrate.
Public/Granted literature
- US20130277735A1 WAFER LEVEL MOSFET METALLIZATION Public/Granted day:2013-10-24
Information query
IPC分类: