Invention Grant
- Patent Title: Piezo-electric based micro-electro-mechanical lens actuation system
- Patent Title (中): 压电式微机电镜头驱动系统
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Application No.: US13808341Application Date: 2011-07-04
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Publication No.: US08866364B2Publication Date: 2014-10-21
- Inventor: Aron Michael , Chee Yee Kwok
- Applicant: Aron Michael , Chee Yee Kwok
- Agency: Harness, Dickey & Pierce, PLC
- Priority: AU2010902976 20100705
- International Application: PCT/AU2011/000837 WO 20110704
- International Announcement: WO2012/003529 WO 20120112
- Main IPC: H01L41/00
- IPC: H01L41/00 ; G02B13/00 ; H01L41/09 ; G02B26/08

Abstract:
Disclosed is a piezo-electrically actuated micro-mechanical deformable member comprising a corrugated longitudinal beam (521) formed in a substrate, and having a first anchored end (502) and a second end (509), as well as a plurality of piezoelectric film (PZET) actuating segments (522, 523, 524) formed in or on at least some grooves and ridges of the corrugated beam, the beam (521) being configured to assume one of a number of different geometric configurations depending upon which of a corresponding set of electric actuation signals (105) are applied to the PZET elements, the electric actuation signals establishing corresponding electric fields in the associated PZET segments to thereby deform the member.
Public/Granted literature
- US20130114149A1 PIEZO-ELECTRIC BASED MICRO-ELECTRO-MECHANICAL LENS ACTUATION SYSTEM Public/Granted day:2013-05-09
Information query
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