Invention Grant
- Patent Title: Electric field discharge-type electron source
- Patent Title (中): 电场放电型电子源
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Application No.: US14239144Application Date: 2012-09-24
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Publication No.: US08866371B2Publication Date: 2014-10-21
- Inventor: Souichi Katagiri , Takashi Ohshima , Sukehiro Ito
- Applicant: Hitachi High-Technologies Corporation
- Applicant Address: JP Tokyo
- Assignee: Hitachi High-Technologies Corporation
- Current Assignee: Hitachi High-Technologies Corporation
- Current Assignee Address: JP Tokyo
- Agency: Miles & Stockbridge P.C.
- Priority: JP2011-208402 20110926; JP2012-061395 20120319
- International Application: PCT/JP2012/074319 WO 20120924
- International Announcement: WO2013/047397 WO 20130404
- Main IPC: H01J1/14
- IPC: H01J1/14 ; H01J19/06 ; H01K1/04

Abstract:
Increasing the volume or weight of zirconia which is a diffusion and supply source, to extend the life of a field-emission type electron source causes a problem that the diffusion and supply source itself or a tungsten needle is easily subjected to damage. As another problem, although it is considered to form the diffusion and supply source using a thin film to avoid the above-described problem, it is difficult to stably obtain practical life exceeding 8,000 hours. It has been found that practical life exceeding 8,000 hours is stably obtained by providing a field-emission type electron source that has no chips or cracks in a diffusion and supply source and that can extend life with a little bit of an increase in the amount of the diffusion and supply source.
Public/Granted literature
- US20140197725A1 ELECTRIC FIELD DISCHARGE-TYPE ELECTRON SOURCE Public/Granted day:2014-07-17
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