Invention Grant
- Patent Title: Buffer station for stocker system
- Patent Title (中): 储存器系统缓冲站
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Application No.: US11881093Application Date: 2007-07-25
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Publication No.: US08868229B2Publication Date: 2014-10-21
- Inventor: Lutz Rebstock
- Applicant: Lutz Rebstock
- Applicant Address: DE Radolfzell
- Assignee: Dynamic Micro System Semiconductor Equipment GmbH
- Current Assignee: Dynamic Micro System Semiconductor Equipment GmbH
- Current Assignee Address: DE Radolfzell
- Agent Tue Nguyen
- Main IPC: G06F7/00
- IPC: G06F7/00 ; H01L21/677 ; G03F7/20

Abstract:
A buffer station provides potential improvement for the operation of a facility. By storing to-be-accessed workpieces in the buffer stations of an equipment, the operation of the facility is not interrupted when the equipment is down. The workpieces can be retrieved through emergency access port of the buffer station, thus ensure the continuous supply of workpieces for the workpiece flow of the facility. Algorithm for getting the needed workpieces to the buffer station is also provided through a controller or a computer mechanism. The buffer station can be incorporated in a stocker, such as wafer stocker or reticle stocker.
Public/Granted literature
- US20080041694A1 Buffer station for stocker system Public/Granted day:2008-02-21
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