Invention Grant
- Patent Title: Locally optimized coloring for cleaning lithographic hotspots
- Patent Title (中): 用于清洁光刻热点的局部优化着色
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Application No.: US13717816Application Date: 2012-12-18
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Publication No.: US08869075B2Publication Date: 2014-10-21
- Inventor: Yuyang Sun , Chidambaram Kallingal , Marc Tarabbia
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Keohane & D'Alessandro, PLLC
- Agent Hunter E. Webb
- Main IPC: G06F17/50
- IPC: G06F17/50

Abstract:
Approaches for cleaning/resolving lithographic hotspots (e.g., during a simulation phase of semiconductor design) are provided. Typically, a hotspot will be identified in a first polygon (having a first color) of a lithographic pattern or contour. Once a hotspot has been identified, a location (e.g., another portion of the first polygon or in a second polygon of the lithographic pattern having the first color) proximate the hotspot will be identified to place a stitch marker. Once the location has been identified, a stitch marker will be placed at that location. Then, a color of the stitch marked location will be changed to a second color, and the resulting lithographic pattern can be further processed to clean/resolve the hotspot.
Public/Granted literature
- US20140173533A1 LOCALLY OPTIMIZED COLORING FOR CLEANING LITHOGRAPHIC HOTSPOTS Public/Granted day:2014-06-19
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