Invention Grant
US08869075B2 Locally optimized coloring for cleaning lithographic hotspots 有权
用于清洁光刻热点的局部优化着色

Locally optimized coloring for cleaning lithographic hotspots
Abstract:
Approaches for cleaning/resolving lithographic hotspots (e.g., during a simulation phase of semiconductor design) are provided. Typically, a hotspot will be identified in a first polygon (having a first color) of a lithographic pattern or contour. Once a hotspot has been identified, a location (e.g., another portion of the first polygon or in a second polygon of the lithographic pattern having the first color) proximate the hotspot will be identified to place a stitch marker. Once the location has been identified, a stitch marker will be placed at that location. Then, a color of the stitch marked location will be changed to a second color, and the resulting lithographic pattern can be further processed to clean/resolve the hotspot.
Public/Granted literature
Information query
Patent Agency Ranking
0/0