Invention Grant
- Patent Title: Reduction of the dynamic deformation of translational mirrors using inertial masses
- Patent Title (中): 使用惯性质量减少平移反射镜的动态变形
-
Application No.: US13377667Application Date: 2010-07-06
-
Publication No.: US08873128B2Publication Date: 2014-10-28
- Inventor: Holger Conrad , Thomas Grasshoff , Denis Jung , Thilo Sandner
- Applicant: Holger Conrad , Thomas Grasshoff , Denis Jung , Thilo Sandner
- Applicant Address: DE Munich DE Dresden
- Assignee: Fraunhofer-Gesellschaft zur Foerderung der Angewandten Forschung E.V.,Technische Universitaet Dresden
- Current Assignee: Fraunhofer-Gesellschaft zur Foerderung der Angewandten Forschung E.V.,Technische Universitaet Dresden
- Current Assignee Address: DE Munich DE Dresden
- Agency: Jacobson Holman, PLLC.
- Priority: DE102009033191 20090707
- International Application: PCT/DE2010/000805 WO 20100706
- International Announcement: WO2011/003404 WO 20110113
- Main IPC: G02B26/00
- IPC: G02B26/00 ; G02B26/10
Abstract:
A micromechanical mirror arrangement comprising a mirror plate (1) which forms a translation mirror, which is connected via at least one holding element (2), preferably two or more holding elements, to a frame structure (3) and is movable in translation relative to this frame structure, characterized in that the connection region (4) of at least one holding element (2), preferably of all holding elements, with the mirror plate (1) is arranged inwardly offset, viewed from the outer margin (5) of the mirror plate toward to the center (6) of the mirror plate.
Public/Granted literature
- US20120099175A1 REDUCTION OF THE DYNAMIC DEFORMATION OF TRANSLATIONAL MIRRORS USING INERTIAL MASSES Public/Granted day:2012-04-26
Information query
