Invention Grant
- Patent Title: Illumination system for a microlithgraphic exposure apparatus
- Patent Title (中): 微型照相曝光设备的照明系统
-
Application No.: US11911904Application Date: 2006-04-26
-
Publication No.: US08873151B2Publication Date: 2014-10-28
- Inventor: Alexander Sohmer , Aurelian Dodoc , Heiko Feldmann , Wilhelm Ulrich , Gerhard Fuerter , Rafael Egger , Artur Moegele , Michael Raum
- Applicant: Alexander Sohmer , Aurelian Dodoc , Heiko Feldmann , Wilhelm Ulrich , Gerhard Fuerter , Rafael Egger , Artur Moegele , Michael Raum
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- International Application: PCT/EP2006/003864 WO 20060426
- International Announcement: WO2006/114294 WO 20061102
- Main IPC: G02B3/00
- IPC: G02B3/00 ; G03F7/20 ; G02B17/08 ; G02B27/00

Abstract:
An illumination system of a microlithographic exposure apparatus comprises a condenser for transforming a pupil plane into a field plane. The condenser has a lens group that contains a plurality of consecutive lenses. These lenses are arranged such that a light bundle focused by the condenser on an on-axis field point converges within each lens of the lens group. At least one lens of the lens group has a concave surface. The illumination system may further comprise a field stop objective that at least partly corrects a residual pupil aberration of the condenser.
Public/Granted literature
- US20080192359A1 Illumination System for a Microlithgraphic Exposure Apparatus Public/Granted day:2008-08-14
Information query