Invention Grant
- Patent Title: CMUT cell formed from a membrane of nanotubes or nanowires or nanorods and device for ultra high frequency acoustic imaging including multiple cells of this kind
- Patent Title (中): 由纳米管或纳米棒形成的CMUT细胞和用于超高频声学成像的装置，包括这种多重细胞
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Application No.: US13130397Application Date: 2009-11-20
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Publication No.: US08873341B2Publication Date: 2014-10-28
- Inventor: Berengere Lebental , Anne Ghis
- Applicant: Berengere Lebental , Anne Ghis
- Applicant Address: FR Paris FR Paris FR Marne la Vallee
- Assignee: Commissariat a l'energie Atomique et aux Energies Alternatives,Laboratoire Central des Ponts et Chaussees,Ecole Nationale des Ponts et Chaussees
- Current Assignee: Commissariat a l'energie Atomique et aux Energies Alternatives,Laboratoire Central des Ponts et Chaussees,Ecole Nationale des Ponts et Chaussees
- Current Assignee Address: FR Paris FR Paris FR Marne la Vallee
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: FR0857928 20081121
- International Application: PCT/EP2009/065582 WO 20091120
- International Announcement: WO2010/057992 WO 20100527
- Main IPC: B06B1/02
- IPC: B06B1/02 ; B60B1/02 ; B81C1/00 ; H01L29/16
Abstract:
A cMUT-type capacitive electroacoustic transducer including: at least one membrane configured to oscillate under effect of an electric field and/or an acoustic wave, wherein the membrane is formed from one or more layers of juxtaposed nanotubes or nanowires or nanorods, and an acoustic imaging device or UHF sonar including such transducers.
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