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US08873901B2 Buried-type optical input/output devices and methods of manufacturing the same 有权
掩埋式光输入/输出装置及其制造方法

Buried-type optical input/output devices and methods of manufacturing the same
Abstract:
Optical input/output (I/O) devices, which include a substrate including a trench, a waveguide within the trench of the substrate; and a photodetector within the trench and optically connected to the waveguide. An upper surface of the photodetector is at a same level as an upper surface of the waveguide.
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