Invention Grant
- Patent Title: Process tool chemical and gas usage optimization
- Patent Title (中): 过程工具化学和气体使用优化
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Application No.: US13308124Application Date: 2011-11-30
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Publication No.: US08874416B2Publication Date: 2014-10-28
- Inventor: Krishna Vepa , Parris C. M. Hawkins , Andreas Neuber
- Applicant: Krishna Vepa , Parris C. M. Hawkins , Andreas Neuber
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Blakely, Sokoloff, Taylor & Zafman LLP
- Main IPC: G06G7/48
- IPC: G06G7/48 ; G05B19/418 ; G06Q10/04
Abstract:
A resource usage optimization server determines a degradation caused by a first resource. The resource usage optimization server determines a cleaning caused by a second resource. The resource usage optimization server calculates a ratio of the degradation and the cleaning.
Public/Granted literature
- US20120143574A1 PROCESS TOOL CHEMICAL AND GAS USAGE OPTIMIZATION Public/Granted day:2012-06-07
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