Invention Grant
- Patent Title: Mask layout formation
- Patent Title (中): 面膜布局形成
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Application No.: US12901595Application Date: 2010-10-11
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Publication No.: US08875063B2Publication Date: 2014-10-28
- Inventor: Zachary Baum , Scott D. Halle , Henning Haffner
- Applicant: Zachary Baum , Scott D. Halle , Henning Haffner
- Applicant Address: US NY Armonk US CA Milpitas
- Assignee: International Business Machines Corporation,Infineon Technologies North America Corp.
- Current Assignee: International Business Machines Corporation,Infineon Technologies North America Corp.
- Current Assignee Address: US NY Armonk US CA Milpitas
- Agency: Hoffman Warnick LLC
- Agent Yuanmin Cai
- Main IPC: G06F17/50
- IPC: G06F17/50 ; G03F1/00 ; G03F1/30

Abstract:
A method for forming a mask layout is described. A plurality of phase shapes are formed on either side of a critical feature of a design layout of an intergrated circuit chip having a plurality of critical features. A plurality of transition edges are identified from the edges of each phase shape. Each transition edge is parallel to critical feature. A transition space is identified as defined by one of the group including two transition edges and one transition edge. A transition polygon is formed by closing each transition space with at least one closing edge. Each transition polygon is transformed into a printing assist feature. A mask layout is formed from the printing assist features and critical features.
Public/Granted literature
- US20120089953A1 MASK LAYOUT FORMATION Public/Granted day:2012-04-12
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