Invention Grant
- Patent Title: Electronic damper circuit for MEMS sensors and resonators
- Patent Title (中): 用于MEMS传感器和谐振器的电子阻尼器电路
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Application No.: US13281928Application Date: 2011-10-26
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Publication No.: US08875578B2Publication Date: 2014-11-04
- Inventor: Eric B. Smith
- Applicant: Eric B. Smith
- Applicant Address: US TX Austin
- Assignee: Silicon Laboratories Inc.
- Current Assignee: Silicon Laboratories Inc.
- Current Assignee Address: US TX Austin
- Agency: Abel Law Group, LLP
- Main IPC: G01P15/13
- IPC: G01P15/13 ; G01C19/56 ; G01P15/125 ; G01C19/5726 ; G01P15/097 ; G01P1/00 ; G01P15/08
Abstract:
An apparatus includes a microelectromechanical system (MEMS) device including a mass anchored to a substrate. The MEMS device is configured to generate an output signal indicative of motion of the mass with respect to the substrate. The MEMS device includes a feedback module configured to provide a control signal to the MEMS device. The control signal is based on the output signal. The MEMS device is configured to apply a damping force to the mass in response to the control signal.
Public/Granted literature
- US20130104656A1 ELECTRONIC DAMPER CIRCUIT FOR MEMS SENSORS AND RESONATORS Public/Granted day:2013-05-02
Information query
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