Invention Grant
US08875979B2 Apparatus and method for determining an alignment of a bondhead of a die bonder relative to a workchuck
有权
用于确定管芯接合器相对于工件的接合头的对准的装置和方法
- Patent Title: Apparatus and method for determining an alignment of a bondhead of a die bonder relative to a workchuck
- Patent Title (中): 用于确定管芯接合器相对于工件的接合头的对准的装置和方法
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Application No.: US13463970Application Date: 2012-05-04
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Publication No.: US08875979B2Publication Date: 2014-11-04
- Inventor: Chung Sheung Yung , Chi Ming Chong , Gary Peter Widdowson
- Applicant: Chung Sheung Yung , Chi Ming Chong , Gary Peter Widdowson
- Applicant Address: SG Singapore
- Assignee: ASM Technology Singapore Pte. Ltd.
- Current Assignee: ASM Technology Singapore Pte. Ltd.
- Current Assignee Address: SG Singapore
- Agency: Sughrue Mion, PLLC
- Main IPC: B23K20/00
- IPC: B23K20/00 ; B23K20/02 ; B23K31/12 ; B23K31/02

Abstract:
Disclosed is an apparatus for determining an alignment of a bondhead of a die bonder relative to a workchuck. Specifically, the apparatus comprises: i) a sensor configured to measure a distance between the bondhead and the sensor; and ii) a positioning device coupled to the sensor, the positioning device being configured to position the sensor relative to a plurality of locations on the bondhead facing the sensor. In particular, the sensor is operative to measure a set of distances between each of the plurality of locations on the bondhead and the sensor, the set of distances being for determining the alignment of the bondhead. A method of determining an alignment of a bondhead of a die bonder relative to a workchuck is also disclosed.
Public/Granted literature
- US20130292454A1 APPARATUS AND METHOD FOR DETERMINING AN ALIGNMENT OF A BONDHEAD OF A DIE BONDER RELATIVE TO A WORKCHUCK Public/Granted day:2013-11-07
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