Invention Grant
US08875979B2 Apparatus and method for determining an alignment of a bondhead of a die bonder relative to a workchuck 有权
用于确定管芯接合器相对于工件的接合头的对准的装置和方法

Apparatus and method for determining an alignment of a bondhead of a die bonder relative to a workchuck
Abstract:
Disclosed is an apparatus for determining an alignment of a bondhead of a die bonder relative to a workchuck. Specifically, the apparatus comprises: i) a sensor configured to measure a distance between the bondhead and the sensor; and ii) a positioning device coupled to the sensor, the positioning device being configured to position the sensor relative to a plurality of locations on the bondhead facing the sensor. In particular, the sensor is operative to measure a set of distances between each of the plurality of locations on the bondhead and the sensor, the set of distances being for determining the alignment of the bondhead. A method of determining an alignment of a bondhead of a die bonder relative to a workchuck is also disclosed.
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