Invention Grant
US08876974B2 Chemical vapor deposition apparatus capable of controlling discharging fluid flow path in reaction chamber 有权
能够控制反应室内排出流体流路的化学气相沉积装置

  • Patent Title: Chemical vapor deposition apparatus capable of controlling discharging fluid flow path in reaction chamber
  • Patent Title (中): 能够控制反应室内排出流体流路的化学气相沉积装置
  • Application No.: US12843681
    Application Date: 2010-07-26
  • Publication No.: US08876974B2
    Publication Date: 2014-11-04
  • Inventor: Myung Woo Han
  • Applicant: Myung Woo Han
  • Applicant Address: KR Gyeonggi-do
  • Assignee: LIGADP Co., Ltd.
  • Current Assignee: LIGADP Co., Ltd.
  • Current Assignee Address: KR Gyeonggi-do
  • Agency: William Park & Associates Patent Ltd.
  • Priority: KR10-2009-0068831 20090728
  • Main IPC: C23C16/455
  • IPC: C23C16/455
Chemical vapor deposition apparatus capable of controlling discharging fluid flow path in reaction chamber
Abstract:
A chemical vapor deposition apparatus is equipped to control the width of a gas discharge path between a susceptor and an inner surface of a chamber without having to resort to redesign and remanufacturing of the apparatus. The chemical vapor deposition apparatus includes: a chamber; a susceptor positioned inside the chamber and on which a substrate can be loaded; a shower head injecting a processing gas toward the substrate; and a guide unit detachably installed inside the chamber to guide the processing gas such that the processing gas injected from the shower head is discharged through a chamber hole formed in the chamber.
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