Invention Grant
US08877000B2 Shower head gas injection apparatus with secondary high pressure pulsed gas injection 有权
带二级高压脉冲气体喷射的喷头喷气装置

Shower head gas injection apparatus with secondary high pressure pulsed gas injection
Abstract:
A plasma-processing chamber including pulsed gas injection orifices/nozzles utilized in combination with continuous flow shower head injection orifices is described. The continuous flow shower head injection orifices introduce a continuous flow of gas while the pulsed gas injection orifices/nozzles cyclically inject a high-pressure gas into the chamber. In one embodiment, a central computer may monitor and control pressure measurement devices and utilize the measurements to adjust processing parameters (e.g. pulse duration, pulse repetition rate, and the pulse mass flow rate of processing gases).
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