Invention Grant
- Patent Title: Shower head gas injection apparatus with secondary high pressure pulsed gas injection
- Patent Title (中): 带二级高压脉冲气体喷射的喷头喷气装置
-
Application No.: US10469592Application Date: 2002-02-26
-
Publication No.: US08877000B2Publication Date: 2014-11-04
- Inventor: Eric J. Strang
- Applicant: Eric J. Strang
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- International Application: PCT/US02/03405 WO 20020226
- International Announcement: WO02/071463 WO 20020912
- Main IPC: C23F1/00
- IPC: C23F1/00 ; C23C16/50 ; C23C16/52 ; C23C16/455 ; C23C16/509 ; H01J37/32

Abstract:
A plasma-processing chamber including pulsed gas injection orifices/nozzles utilized in combination with continuous flow shower head injection orifices is described. The continuous flow shower head injection orifices introduce a continuous flow of gas while the pulsed gas injection orifices/nozzles cyclically inject a high-pressure gas into the chamber. In one embodiment, a central computer may monitor and control pressure measurement devices and utilize the measurements to adjust processing parameters (e.g. pulse duration, pulse repetition rate, and the pulse mass flow rate of processing gases).
Public/Granted literature
- US20040123803A1 Shower head gas injection apparatus with secondary high pressure pulsed gas injection Public/Granted day:2004-07-01
Information query