Invention Grant
- Patent Title: Method for refreshing an acid bath solution
- Patent Title (中): 刷新酸浴溶液的方法
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Application No.: US13530155Application Date: 2012-06-22
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Publication No.: US08877084B2Publication Date: 2014-11-04
- Inventor: Liming Zhang , Hong Zhou , Yanping Liu
- Applicant: Liming Zhang , Hong Zhou , Yanping Liu
- Applicant Address: US NY Schenectady
- Assignee: General Electric Company
- Current Assignee: General Electric Company
- Current Assignee Address: US NY Schenectady
- Agency: Dority & Manning, PA
- Main IPC: C23F1/46
- IPC: C23F1/46 ; C23F1/16 ; H01L21/67 ; C23F1/08
Abstract:
A method for refreshing an acid bath solution includes determining a concentration of phosphoric acid in the acid bath solution and determining a concentration of hydrochloric acid in the acid bath solution. The method further includes calculating a volume of phosphoric acid to add to the acid bath solution to achieve a predetermined concentration of phosphoric acid in the acid bath solution. In addition, the method includes calculating a volume of hydrochloric acid to add to the acid bath solution with the volume of phosphoric acid to increase the acid bath solution to a predetermined volume, and adding the volume of phosphoric acid and the volume of hydrochloric acid to the acid bath solution.
Public/Granted literature
- US20130341557A1 METHOD FOR REFRESHING AN ACID BATH SOLUTION Public/Granted day:2013-12-26
Information query
IPC分类:
