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US08877591B2 Methods of manufacturing vertical structure nonvolatile memory devices 有权
制造垂直结构非易失性存储器件的方法

Methods of manufacturing vertical structure nonvolatile memory devices
Abstract:
A vertical structure nonvolatile memory device can include a channel layer that extends in a vertical direction on a substrate. A memory cell string includes a plurality of transistors that are disposed on the substrate in the vertical direction along a vertical sidewall of the channel layer. At least one of the plurality of transistors includes at least one recess in a gate of the transistor into which at least one protrusion, which includes the channel layer, extends.
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