Invention Grant
US08877594B2 CMOS device for reducing radiation-induced charge collection and method for fabricating the same 有权
用于减少辐射诱导的电荷收集的CMOS器件及其制造方法

CMOS device for reducing radiation-induced charge collection and method for fabricating the same
Abstract:
A CMOS device for reducing a radiation-induced charge collection and a method for fabricating the same. In the CMOS device, a heavily doped charge collection-suppressed region is disposed directly under the source region and the drain region. The region has a doping type opposite that of the source region and the drain region, and has a doping concentration not less than that of the source region and the drain region. The charge collection-suppressed region has a lateral part slightly less than or equal to that of the source region and the drain region, and has a lateral range toward to the channel not exceed the edges of the source region and the drain region. The CMOS device may greatly reduce a range of the funnel that appears under the action of a single particle, so that charges collected instantaneously under a force of an electric field may be reduced.
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