Invention Grant
US08877594B2 CMOS device for reducing radiation-induced charge collection and method for fabricating the same
有权
用于减少辐射诱导的电荷收集的CMOS器件及其制造方法
- Patent Title: CMOS device for reducing radiation-induced charge collection and method for fabricating the same
- Patent Title (中): 用于减少辐射诱导的电荷收集的CMOS器件及其制造方法
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Application No.: US13509170Application Date: 2011-11-30
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Publication No.: US08877594B2Publication Date: 2014-11-04
- Inventor: Ru Huang , Fei Tan , Xia An , Qianqian Huang , Dong Yang , Xing Zhang
- Applicant: Ru Huang , Fei Tan , Xia An , Qianqian Huang , Dong Yang , Xing Zhang
- Applicant Address: CN Beijing
- Assignee: Peking University
- Current Assignee: Peking University
- Current Assignee Address: CN Beijing
- Agency: Maschoff Brennan
- Priority: CN201110359705 20111114
- International Application: PCT/CN2011/083244 WO 20111130
- International Announcement: WO2013/071650 WO 20130523
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L29/10 ; H01L29/66 ; H01L29/78

Abstract:
A CMOS device for reducing a radiation-induced charge collection and a method for fabricating the same. In the CMOS device, a heavily doped charge collection-suppressed region is disposed directly under the source region and the drain region. The region has a doping type opposite that of the source region and the drain region, and has a doping concentration not less than that of the source region and the drain region. The charge collection-suppressed region has a lateral part slightly less than or equal to that of the source region and the drain region, and has a lateral range toward to the channel not exceed the edges of the source region and the drain region. The CMOS device may greatly reduce a range of the funnel that appears under the action of a single particle, so that charges collected instantaneously under a force of an electric field may be reduced.
Public/Granted literature
- US20130119445A1 CMOS DEVICE FOR REDUCING RADIATION-INDUCED CHARGE COLLECTION AND METHOD FOR FABRICATING THE SAME Public/Granted day:2013-05-16
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