Invention Grant
- Patent Title: Super lattice/quantum well nanowires
- Patent Title (中): 超晶格/量子阱纳米线
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Application No.: US13555383Application Date: 2012-07-23
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Publication No.: US08878259B2Publication Date: 2014-11-04
- Inventor: Harold J. Hovel , Qiang Huang , Xiaoyan Shao , James Vichiconti , George F. Walker
- Applicant: Harold J. Hovel , Qiang Huang , Xiaoyan Shao , James Vichiconti , George F. Walker
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Novak Druce Connolly Bove + Quigg LLP
- Agent Louis J. Percello, Esq.
- Main IPC: H01L29/94
- IPC: H01L29/94 ; H01L29/76 ; H01L31/119 ; H01L31/113 ; H01L31/062 ; H01L31/18 ; B82Y10/00 ; B82Y30/00 ; C30B29/02 ; C30B29/06 ; C30B29/40 ; C30B29/52 ; C30B29/60 ; C30B33/10 ; H01L21/306 ; H01L29/06 ; H01L29/12 ; H01L31/0352 ; H01L33/20

Abstract:
Segmented semiconductor nanowires are manufactured by removal of material from a layered structure of two or more semiconductor materials in the absence of a template. The removal takes place at some locations on the surface of the layered structure and continues preferentially along the direction of a crystallographic axis, such that nanowires with a segmented structure remain at locations where little or no removal occurs. The interface between different segments can be perpendicular to or at angle with the longitudinal direction of the nanowire.
Public/Granted literature
- US20120286236A1 SUPER LATTICE/QUANTUM WELL NANOWIRES Public/Granted day:2012-11-15
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