Invention Grant
US08878273B2 Semiconductor memory device including narrower storage node contact plugs
有权
半导体存储器件包括较窄的存储节点接触插头
- Patent Title: Semiconductor memory device including narrower storage node contact plugs
- Patent Title (中): 半导体存储器件包括较窄的存储节点接触插头
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Application No.: US13369900Application Date: 2012-02-09
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Publication No.: US08878273B2Publication Date: 2014-11-04
- Inventor: Daeik Kim , Sooho Shin
- Applicant: Daeik Kim , Sooho Shin
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Myers Bigel Sibley & Sajovec, PA
- Priority: KR10-2011-0017869 20110228
- Main IPC: H01L29/94
- IPC: H01L29/94 ; H01L27/108

Abstract:
A semiconductor memory device includes an active region protruding from a substrate. The active region includes first and second doped regions therein and a trench therein separating the first and second doped regions. A buried gate structure extends in a first direction along the trench between first and second opposing sidewalls thereof. A conductive interconnection plug is provided on the first doped region adjacent the first sidewall of the trench, and a conductive landing pad is provided on the second doped region adjacent the second sidewall of the trench. The landing pad has a width greater than that of the second doped region of the active region along the first direction. A conductive storage node contact plug is provided on the landing pad opposite the second doped region. The storage node contact plug has a narrower width than the landing pad along the first direction.
Public/Granted literature
- US20120217559A1 SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2012-08-30
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