Invention Grant
US08878291B2 Semiconductor device and method of fabricating the same 有权
半导体装置及其制造方法

  • Patent Title: Semiconductor device and method of fabricating the same
  • Patent Title (中): 半导体装置及其制造方法
  • Application No.: US13714310
    Application Date: 2012-12-13
  • Publication No.: US08878291B2
    Publication Date: 2014-11-04
  • Inventor: Yong Sun Jung
  • Applicant: SK Hynix Inc.
  • Applicant Address: KR Icheon
  • Assignee: SK Hynix Inc.
  • Current Assignee: SK Hynix Inc.
  • Current Assignee Address: KR Icheon
  • Priority: KR10-2012-0083218 20120730
  • Main IPC: H01L29/423
  • IPC: H01L29/423 H01L27/112
Semiconductor device and method of fabricating the same
Abstract:
A semiconductor device includes a first buried gate structure in a peripheral circuit area of a semiconductor substrate, and a second gate structure formed on the semiconductor substrate. A gate insulating layer of a program transistor is thinly formed to be easily ruptured, and a gate insulating layer of a select transistor is thickly formed to improve reliability of the select transistor.
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