Invention Grant
US08878316B2 Cap side bonding structure for backside absolute pressure sensors
有权
用于背面绝对压力传感器的盖侧接合结构
- Patent Title: Cap side bonding structure for backside absolute pressure sensors
- Patent Title (中): 用于背面绝对压力传感器的盖侧接合结构
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Application No.: US13774423Application Date: 2013-02-22
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Publication No.: US08878316B2Publication Date: 2014-11-04
- Inventor: Xiaoyi Ding
- Applicant: Continental Automotive Systems, Inc.
- Applicant Address: US MI Auburn Hills
- Assignee: Continental Automotive Systems, Inc.
- Current Assignee: Continental Automotive Systems, Inc.
- Current Assignee Address: US MI Auburn Hills
- Main IPC: H01L29/82
- IPC: H01L29/82 ; B81B3/00

Abstract:
A pressure sensor includes a pressure sensing element having a diaphragm, a cavity, and bridge circuitry connected to the diaphragm. A top surface is formed as part of the pressure sensing element such that at least a portion of the top surface is part of the diaphragm, and the plurality of piezoresistors are located on the top surface. A cap is bonded to the top surface through the use of a plurality of layers. One of the layers is a silicon dioxide layer, another layer is a silicon nitride layer, another layer is an oxide layer, and another of the layers is a polysilicon layer. The plurality of layers provides proper bonding between the cap and the top surface of the pressure sensing element.
Public/Granted literature
- US20140239424A1 CAP BONDING STRUCTURE AND METHOD FOR BACKSIDE ABSOLUTE PRESSURE SENSORS Public/Granted day:2014-08-28
Information query
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