Invention Grant
US08878316B2 Cap side bonding structure for backside absolute pressure sensors 有权
用于背面绝对压力传感器的盖侧接合结构

Cap side bonding structure for backside absolute pressure sensors
Abstract:
A pressure sensor includes a pressure sensing element having a diaphragm, a cavity, and bridge circuitry connected to the diaphragm. A top surface is formed as part of the pressure sensing element such that at least a portion of the top surface is part of the diaphragm, and the plurality of piezoresistors are located on the top surface. A cap is bonded to the top surface through the use of a plurality of layers. One of the layers is a silicon dioxide layer, another layer is a silicon nitride layer, another layer is an oxide layer, and another of the layers is a polysilicon layer. The plurality of layers provides proper bonding between the cap and the top surface of the pressure sensing element.
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