Invention Grant
US08878349B2 Semiconductor chip and stacked semiconductor package having the same 有权
半导体芯片和具有相同的堆叠半导体封装

Semiconductor chip and stacked semiconductor package having the same
Abstract:
A semiconductor chip includes a semiconductor substrate having one surface, an other surface which faces away from the one surface, and through holes which pass through the one surface and the other surface; through electrodes filled in the through holes; and a gettering layer formed of polysilicon interposed between the through electrodes and inner surfaces of the semiconductor substrate whose form is defined by the through holes.
Information query
Patent Agency Ranking
0/0