Invention Grant
US08879135B2 Device and method for deflecting a light beam in two different directions and scanning microscope
有权
用于在两个不同方向上偏转光束的装置和方法以及扫描显微镜
- Patent Title: Device and method for deflecting a light beam in two different directions and scanning microscope
- Patent Title (中): 用于在两个不同方向上偏转光束的装置和方法以及扫描显微镜
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Application No.: US13503436Application Date: 2010-08-27
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Publication No.: US08879135B2Publication Date: 2014-11-04
- Inventor: Dirk-Oliver Fehrer , Ingo Boehm
- Applicant: Dirk-Oliver Fehrer , Ingo Boehm
- Applicant Address: DE Wetzlar
- Assignee: Leica Microsystems CMS GmbH
- Current Assignee: Leica Microsystems CMS GmbH
- Current Assignee Address: DE Wetzlar
- Agency: Leydig, Voit & Mayer, Ltd.
- Priority: DE102009050340 20091023
- International Application: PCT/EP2010/062532 WO 20100827
- International Announcement: WO2011/047911 WO 20110428
- Main IPC: G02B26/08
- IPC: G02B26/08 ; G02B26/10 ; G02B26/12 ; G02B7/182 ; G02B21/00

Abstract:
A device for deflecting a light beam in two different directions includes a mirror and a first rotating actuator element configured to rotate about a first axis as a function of a first actuation signal. A second rotating actuator element is disposed opposite to the first rotating actuator element along the first axis and configured to rotate about the first axis as a function of a second actuation signal. A first spring element is connected to the first rotating actuator element and, off-axially with respect to the first axis at a predetermined first distance thereto, to the mirror in a rest position of the mirror. A second spring element is connected to the second rotating actuator element and to the mirror.
Public/Granted literature
- US20120212790A1 DEVICE AND METHOD FOR DEFLECTING A LIGHT BEAM IN TWO DIFFERENT DIRECTIONS AND SCANNING MICROSCOPE Public/Granted day:2012-08-23
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