Invention Grant
US08879135B2 Device and method for deflecting a light beam in two different directions and scanning microscope 有权
用于在两个不同方向上偏转光束的装置和方法以及扫描显微镜

Device and method for deflecting a light beam in two different directions and scanning microscope
Abstract:
A device for deflecting a light beam in two different directions includes a mirror and a first rotating actuator element configured to rotate about a first axis as a function of a first actuation signal. A second rotating actuator element is disposed opposite to the first rotating actuator element along the first axis and configured to rotate about the first axis as a function of a second actuation signal. A first spring element is connected to the first rotating actuator element and, off-axially with respect to the first axis at a predetermined first distance thereto, to the mirror in a rest position of the mirror. A second spring element is connected to the second rotating actuator element and to the mirror.
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