Invention Grant
US08879321B2 Vertical non-volatile memory device and electric-electronic system having the same device 有权
垂直非易失性存储器件和具有相同器件的电子电子系统

Vertical non-volatile memory device and electric-electronic system having the same device
Abstract:
Provided is a vertical non-volatile memory device having a metal source line. The vertical non-volatile memory device includes cell string units that are formed on first portions of a semiconductor substrate and are vertically arranged with respect to a surface of the semiconductor substrate, impurity regions formed on second portions of the semiconductor substrate between the cell string units, conductive lines formed on the impurity regions, and spacers that are formed on the sidewalls of the cell string units and insulate the conductive lines from the cells string units.
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