Invention Grant
US08881297B2 Access arbitration module and system for semiconductor fabrication equipment and methods for using and operating the same 有权
半导体制造设备的访问仲裁模块和系统及其使用和操作的方法

Access arbitration module and system for semiconductor fabrication equipment and methods for using and operating the same
Abstract:
An access arbitration module includes a plurality of active component communication ports for communicating with a plurality of active components, and includes a passive component communication port for communicating with a passive component. The access arbitration module also includes switching logic defined to control transmission of access communication protocol signals between each of the plurality of active component communication ports and the passive component communication port, such that an authorized one of the plurality of active component communication ports is connected in communication with the passive component communication port at a given time, and such that non-authorized ones of the plurality of active component communication ports are prevented from communication with the passive component communication port at the given time.
Information query
Patent Agency Ranking
0/0