Invention Grant
- Patent Title: Access arbitration module and system for semiconductor fabrication equipment and methods for using and operating the same
- Patent Title (中): 半导体制造设备的访问仲裁模块和系统及其使用和操作的方法
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Application No.: US13605941Application Date: 2012-09-06
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Publication No.: US08881297B2Publication Date: 2014-11-04
- Inventor: Pablo Gonzalez , Gary Roy Watts
- Applicant: Pablo Gonzalez , Gary Roy Watts
- Applicant Address: US MA Chelmsford
- Assignee: Brooks Automation, Inc.
- Current Assignee: Brooks Automation, Inc.
- Current Assignee Address: US MA Chelmsford
- Agency: Martine Penilla Group, LLP
- Main IPC: H01L21/52
- IPC: H01L21/52 ; G06F21/44 ; H01L21/98

Abstract:
An access arbitration module includes a plurality of active component communication ports for communicating with a plurality of active components, and includes a passive component communication port for communicating with a passive component. The access arbitration module also includes switching logic defined to control transmission of access communication protocol signals between each of the plurality of active component communication ports and the passive component communication port, such that an authorized one of the plurality of active component communication ports is connected in communication with the passive component communication port at a given time, and such that non-authorized ones of the plurality of active component communication ports are prevented from communication with the passive component communication port at the given time.
Public/Granted literature
Information query
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