Invention Grant
- Patent Title: Method of fabricating an inertial sensor
- Patent Title (中): 制造惯性传感器的方法
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Application No.: US12888870Application Date: 2010-09-23
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Publication No.: US08881370B2Publication Date: 2014-11-11
- Inventor: William Paul Berger , Mark Andrew Collins , Michael Thomas Frazee , Thad W. (Marc) Smith , Robert Albert Anderson , Stuart John Knowles , Victor Dragotti
- Applicant: William Paul Berger , Mark Andrew Collins , Michael Thomas Frazee , Thad W. (Marc) Smith , Robert Albert Anderson , Stuart John Knowles , Victor Dragotti
- Applicant Address: US CA Moorpark
- Assignee: Custom Sensors & Technologies, Inc.
- Current Assignee: Custom Sensors & Technologies, Inc.
- Current Assignee Address: US CA Moorpark
- Agency: Hamilton, Brook, Smith & Reynolds, P.C.
- Main IPC: G01R31/28
- IPC: G01R31/28 ; G01P1/02 ; B81B7/00 ; B81C1/00 ; G01C19/5628 ; H01L23/057 ; G01C19/5783
Abstract:
Inertial sensor having a body with first and second cavities on opposite sides thereof, a sensing element in the first cavity, electronic circuitry in the second cavity, electrical conductors interconnecting the sensing element and the circuitry, and leads connected electrically to the circuitry and extending from the body for mounting the sensor and making connections with the circuitry.
Public/Granted literature
- US20110010924A1 Inertial sensor with dual cavity package and method of fabrication Public/Granted day:2011-01-20
Information query
