Invention Grant
- Patent Title: Interferometric heterodyne optical encoder system
- Patent Title (中): 干涉外差光学编码器系统
-
Application No.: US13361492Application Date: 2012-01-30
-
Publication No.: US08885172B2Publication Date: 2014-11-11
- Inventor: Peter J. de Groot , Michael Schroeder
- Applicant: Peter J. de Groot , Michael Schroeder
- Applicant Address: US CT Middlefield
- Assignee: Zygo Corporation
- Current Assignee: Zygo Corporation
- Current Assignee Address: US CT Middlefield
- Agency: Fish & Richardson P.C.
- Main IPC: G01B9/02
- IPC: G01B9/02 ; G01B11/02 ; G01D5/347 ; G03F7/20

Abstract:
An encoder interferometry system includes an interferometer positioned to receive first and second beams having different frequencies, in which the interferometer has at least one polarizing beam splitting element for directing the first beam along a measurement path to define a measurement beam and the second beam along a reference path to define a reference beam. The encoder interferometry system further includes a encoder scale positioned to diffract the measurement beam at least once, a detector positioned to receive the measurement and reference beams after the measurement beam diffracts from the encoder scale, and an output component positioned to receive the measurement and reference beams before they reach the detector and deflect spurious portions of the first and second beam away from the detector.
Public/Granted literature
- US20120194824A1 INTERFEROMETRIC HETERODYNE OPTICAL ENCODER SYSTEM Public/Granted day:2012-08-02
Information query