Invention Grant
US08885987B2 Photonic via waveguide for pixel arrays 有权
用于像素阵列的光子通道波导

Photonic via waveguide for pixel arrays
Abstract:
Photonic passive structure to couple and guide light between photonic active devices (101), such as photo-diodes, light emitting devices and light-valves, which may be arranged into 2D arrays, and the top of the metallization layer stack (110,111,112) interconnecting said devices, with said photonic passive structure comprising a hole (116) between the near surface of said photonic active Ndevices and the top of said metallization stack, said hole being filled with a dielectric (113) having embedded metal films (117) and in which the embedded metal thin films are connected to a planar perforated metal film (123,124) formed on top of the metallization stack.
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