Invention Grant
- Patent Title: Optical system, in particular of a microlithographic projection exposure apparatus
- Patent Title (中): 光学系统,特别是微光刻投影曝光装置
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Application No.: US13860755Application Date: 2013-04-11
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Publication No.: US08891060B2Publication Date: 2014-11-18
- Inventor: Ingo Saenger
- Applicant: Carl Zeiss SMT GmbH
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102012206150 20120416
- Main IPC: G03B27/42
- IPC: G03B27/42 ; G02B27/28 ; G03F7/20 ; G02B5/30

Abstract:
The invention relates to an optical system, in particular of a microlithographic projection exposure apparatus, with a polarization-influencing optical arrangement. In accordance with one aspect of the invention, this polarization-influencing optical arrangement comprises: at least one polarization-influencing optical element, which consists of an optically active material with an optical crystal axis and has a thickness profile that varies in the direction of this optical crystal axis, at least one lambda/2 plate; at least one rotator, which causes a rotation of the polarization direction of light incident on the rotator about a constant polarization rotation angle, and an actuator apparatus, by which the lambda/2 plate and the rotator can be moved independently of one another between a position within the optical beam path and a position outside of the optical beam path.
Public/Granted literature
- US20130271741A1 Optical system, in particular of a microlithographic projection exposure apparatus Public/Granted day:2013-10-17
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