Invention Grant
US08891060B2 Optical system, in particular of a microlithographic projection exposure apparatus 有权
光学系统,特别是微光刻投影曝光装置

Optical system, in particular of a microlithographic projection exposure apparatus
Abstract:
The invention relates to an optical system, in particular of a microlithographic projection exposure apparatus, with a polarization-influencing optical arrangement. In accordance with one aspect of the invention, this polarization-influencing optical arrangement comprises: at least one polarization-influencing optical element, which consists of an optically active material with an optical crystal axis and has a thickness profile that varies in the direction of this optical crystal axis, at least one lambda/2 plate; at least one rotator, which causes a rotation of the polarization direction of light incident on the rotator about a constant polarization rotation angle, and an actuator apparatus, by which the lambda/2 plate and the rotator can be moved independently of one another between a position within the optical beam path and a position outside of the optical beam path.
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