Invention Grant
- Patent Title: Miniature MEMS actuator assemblies
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Application No.: US13843107Application Date: 2013-03-15
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Publication No.: US08891186B2Publication Date: 2014-11-18
- Inventor: Robert J. Calvet , Guigin Wang , Roman C. Gutierrez , Xiaolei Liu
- Applicant: DigitalOptics Corporation MEMS
- Applicant Address: US CA Arcadia
- Assignee: DigitalOptics Corporation MEMS
- Current Assignee: DigitalOptics Corporation MEMS
- Current Assignee Address: US CA Arcadia
- Agency: Haynes and Boone, LLP
- Main IPC: G02B7/02
- IPC: G02B7/02 ; G02B7/08 ; G03B13/00 ; G03B3/10 ; G03B17/00 ; H02N1/00

Abstract:
In one embodiment, an electrostatic actuator includes a generally planar fixed frame, a generally planar moving frame coupled to the fixed frame by a flexure for substantially coplanar, perpendicular movement relative to the fixed frame, a plurality of interdigitated teeth, a fixed portion of which is attached to the fixed frame and a moving portion of which is attached to the moving frame, and an elongated output shaft having opposite input and output ends, the input end being coupled to the moving frame.
Public/Granted literature
- US08947797B2 Miniature MEMS actuator assemblies Public/Granted day:2015-02-03
Information query
IPC分类:
G | 物理 |
G02 | 光学 |
G02B | 光学元件、系统或仪器 |
G02B7/00 | 光学元件的安装、调整装置或不漏光连接 |
G02B7/02 | .用于透镜 |