Invention Grant
- Patent Title: VCSEL array with increased efficiency
- Patent Title (中): VCSEL阵列具有更高的效率
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Application No.: US14003818Application Date: 2012-03-02
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Publication No.: US08891569B2Publication Date: 2014-11-18
- Inventor: Philipp Henning Gerlach
- Applicant: Philipp Henning Gerlach
- Applicant Address: NL Eindhoven
- Assignee: Koninklijke Philips N.V.
- Current Assignee: Koninklijke Philips N.V.
- Current Assignee Address: NL Eindhoven
- Agent Larry Liberchuk
- Priority: EP11157527 20110309
- International Application: PCT/IB2012/051003 WO 20120302
- International Announcement: WO2012/120426 WO 20120913
- Main IPC: H01S5/00
- IPC: H01S5/00 ; H01S5/42 ; H01S5/183 ; H01S5/02 ; H01S5/20

Abstract:
The present invention relates to a VCSEL array comprising several VCSELs arranged side by side on a common substrate (1). Each VCSEL is formed of at least a top mirror (5, 14), an active region (4), a current injection layer (3) and an undoped bottom semiconductor mirror (2). The current injection layer (3) is arranged between the active region (4) and the bottom semiconductor mirror (2). At least an upper layer of the substrate (1) is electrically conducting. Trenches (8) and/or holes are formed between the bottom semiconductor mirrors (2) of said VCSELs to said upper layer of said substrate (1). A metallization (9) electrically connects the upper layer of the substrate (1) with the current injection layer (3) through said trenches (8) and/or holes. The proposed VCSEL array allows a homogeneous current injection an has a high efficiency and power density.
Public/Granted literature
- US20130343418A1 VCSEL ARRAY WITH INCREASED EFFICIENCY Public/Granted day:2013-12-26
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