Invention Grant
- Patent Title: Device for classifying defects and method for adjusting classification
- Patent Title (中): 分类缺陷的设备和分类调整方法
-
Application No.: US13376390Application Date: 2010-07-08
-
Publication No.: US08892494B2Publication Date: 2014-11-18
- Inventor: Makoto Ono , Yohei Minekawa , Junko Konishi , Takehiro Hirai , Yuya Isomae
- Applicant: Makoto Ono , Yohei Minekawa , Junko Konishi , Takehiro Hirai , Yuya Isomae
- Applicant Address: JP Tokyo
- Assignee: Hitachi High-Technologies Corporation
- Current Assignee: Hitachi High-Technologies Corporation
- Current Assignee Address: JP Tokyo
- Agency: Antonelli, Terry, Stout & Kraus, LLP.
- Priority: JP2009-172104 20090723
- International Application: PCT/JP2010/061581 WO 20100708
- International Announcement: WO2011/010557 WO 20110127
- Main IPC: G06F15/18
- IPC: G06F15/18 ; G06T7/00

Abstract:
Disclosed is a technique wherein an object that requires adjustment in order to increase the reliability of automatic classification can be easily identified. A device (140) for adjusting classification classifies defects into a first class group according to the feature amount of the defects that are obtained from image data obtained from an electron microscope (110), and classifies the defects into a second class group according to the feature amount of the defects classified into the first class group. And, the device (140) for adjusting the classification calculates classification performance by comparing the defects that have been classified into the second class group, and outputs the calculated classification performance in a predetermined display format to an output unit (180).
Public/Granted literature
- US20120117010A1 DEVICE FOR CLASSIFYING DEFECTS AND METHOD FOR ADJUSTING CLASSIFICATION Public/Granted day:2012-05-10
Information query