Invention Grant
- Patent Title: Method of manufacturing piezoelectric vibrators
- Patent Title (中): 制造压电振子的方法
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Application No.: US12868062Application Date: 2010-08-25
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Publication No.: US08898875B2Publication Date: 2014-12-02
- Inventor: Takeshi Sugiyama
- Applicant: Takeshi Sugiyama
- Applicant Address: JP Chiba
- Assignee: Seiko Instruments Inc.
- Current Assignee: Seiko Instruments Inc.
- Current Assignee Address: JP Chiba
- Agency: Brinks Gilson & Lione
- Priority: JPJP2009-194468 20090825
- Main IPC: H03H3/02
- IPC: H03H3/02 ; H03H9/21 ; H03H9/10 ; G04R20/10

Abstract:
Providing a method for manufacturing a package capable of achieving reliable anodic bonding between the bonding material and a base board wafer even when the bonding material having a large resistance value is used. Providing a method for manufacturing a package by anodically bonding a bonding material, which is fixed in advance to an inner surface of a lid board wafer made of an insulator, to an inner surface of a base board wafer made of an insulator, the method including an anodic bonding step where an auxiliary bonding material serving as an anode is disposed on an outer surface of the lid board wafer, a cathode is disposed on an outer surface of the base board wafer, and a voltage is applied between the auxiliary bonding material and the cathode, wherein the auxiliary bonding material is made of a material that causes an anodic bonding reaction between the auxiliary bonding material and the lid board wafer in the anodic bonding step.
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