Invention Grant
- Patent Title: Homing device for magnetron rotating on two arms
- Patent Title (中): 用于磁控管的回原点装置在两个臂上旋转
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Application No.: US13213367Application Date: 2011-08-19
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Publication No.: US08900427B2Publication Date: 2014-12-02
- Inventor: Keith A. Miller , Michael Allen Flanigan , Hari Ponnekanti
- Applicant: Keith A. Miller , Michael Allen Flanigan , Hari Ponnekanti
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agent Charles S. Guenzer
- Main IPC: C23C14/35
- IPC: C23C14/35 ; H01J37/34

Abstract:
A magnetron actuator for moving a magnetron in a nearly arbitrary radial and azimuthal path in the back of a target in a plasma sputter reactor. The magnetron includes two coaxial rotary shafts extending along the chamber central axis and coupled to two independently controllable rotary actuators. An epicyclic gear mechanism or a frog-leg structure mechanically couple the shafts to the magnetron to control its radial and azimuthal position. A vertical actuator moves the shafts vertically in tandem to vary the magnetron's separation from the target's back surface and compensate for erosion of the front surface. The rotary actuators may be separately coupled to the shafts or a rotatable ring gear may be coupled to the shafts through respectively fixed and orbiting idler gears. Two radially spaced sensors detect reflectors attached to the inner and outer arms of the epicyclic gear mechanism for homing of the controller.
Public/Granted literature
- US20110297538A1 Homing device for magnetron rotating on two arms Public/Granted day:2011-12-08
Information query
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